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Semiconductor Material and Device Characterization - Schroder, Dieter K
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This detailed sourcebook provides an up-to-date description and unified treatment of the characterization techniques used in the semiconductor industry. It covers electrical, optical, electron- beam, ion-beam, X-ray and gamma ray methods. This information, until now scattered in journals and review papers, is presented in a unified manner with over 1300 references. It is also a valuable reference book on characterization methods.

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Semiconductor Material and Device Characterization 1998, Wiley-Interscience, New York, NY

ISBN-13: 9780471241393

2nd Revised edition

Hardcover

Semiconductor Material and Device Characterization 1990, Wiley-Interscience

ISBN-13: 9780471511045

Hardcover