High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) ...
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High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
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Seller's Description:
Fair. No dust jacket. Fair+ condition. COVER (hardcover without dust jacket, as issued)-moderate wear; slight stains, clean overall. PAGES-underlinings on several pages, no notes; bends at margins on several pages, slight tears on one page; occasional minor stains, clean overall. Not ex-library. 500+ pgs.
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Seller's Description:
Good; Hardcover; Moderate wear to the covers; Unblemished textblock edges; Name inside the front cover; The endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be shipped in a sturdy cardboard box with foam padding; Medium Format (8.5"-9.75" tall); White, blue, and green covers with title in black lettering; 1994, Wiley-VCH Publishing; 530 pages; "The Chemistry of Metal CVD, " by Toivo T. Kodas & Mark J. Hampden-Smith.
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
Very Good; Hardcover; Light wear to the covers; Unblemished textblock edges; The endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be shipped in a sturdy cardboard box with foam padding; Medium-Large Format (Quatro, 9.75Äù Äì 10.75Äù tall); White, blue, and green covers with title in black lettering; 1994, Wiley-VCH Publishing; 530 pages; "The Chemistry of Metal CVD, " by Toivo T. Kodas & Mark J. Hampden-Smith.
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
Good++; Hardcover; Clean covers with minor edgewear; Unblemished textblock edges; Name inside the front cover; The endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be stored and delivered in a sturdy cardboard box with foam padding; Medium Format (8.5? ? 9.75? tall); White, blue, and green covers with title in black lettering; 1994, Wiley-VCH Publishing; 530 pages; "The Chemistry of Metal CVD, " by Toivo T. Kodas & Mark J. Hampden-Smith.
