Principles of Plasma...
Michael A Lieberman,
Alan J Lichtenberg
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Plasma Etching: Fundamentals...
Professor M Sugawara,
Barry L Stansfield
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Glow Discharge Processes:...
Brian Chapman
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Plasma Etching Processes for...
Nicolas Posseme (Editor)
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Plasma-Surface Interactions...
O Auciello (Editor),
Alberto Gras-Marti (Editor)
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Dry Etching for VLSI
A.J. van Roosmalen,
J.A.G. Baggerman
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Handbook of Plasma Processing...
Stephen M Rossnagel,
William D Westwood
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Handbook of Advanced Plasma...
R J Shul (Editor),
S J Pearton (Editor)
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Micromachining Using...
Rolf Wuthrich,
Jana D Abou Ziki
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Niederdruckplasmen Und...
Dr. Gerhard Franz
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Plasma Etching: An...
Dennis M Manos (Editor),
Daniel L Flamm (Editor)
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Plasma Processing of...
P F Williams (Editor)
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