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Optical Mems for Chemical Analysis and Biomedicine - Jiang, Hongrui (Editor)
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Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others. This book describes the current state of optical MEMS in chemical and biomedical analysis with topics covered including fabrication and manufacturing technology for optical MEMS; electrothermally-actuated MEMS scanning ...

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Optical Mems for Chemical Analysis and Biomedicine 2016, Institution of Engineering & Technology, Stevenage

ISBN-13: 9781849198974

Hardcover