Achieving high reliability is a key issue for semiconductor optical and electrical devices and is as important as device performance for commercial application. Degradation of both optical and electrical devices is strongly related to materials issues. A variety of material defects can occur during the device fabrication processes, i.e., crystal growth, impurity diffusion, ion-implantation, wet/dry etching, metallization, bonding, packaging, etc. This book focuses on the current status of reliability and degradation of ...
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Achieving high reliability is a key issue for semiconductor optical and electrical devices and is as important as device performance for commercial application. Degradation of both optical and electrical devices is strongly related to materials issues. A variety of material defects can occur during the device fabrication processes, i.e., crystal growth, impurity diffusion, ion-implantation, wet/dry etching, metallization, bonding, packaging, etc. This book focuses on the current status of reliability and degradation of various semiconductor optical and electrical devices as well as their materials issues in thin-film growth, wafer processing, and device fabrication processes. Topics include: laser reliability; degradation mechanisms; optical devices and reliability; electronic device reliability; wide-bandgap devices; compound semiconductors; characterization; characterization methods; strain effects; defects and growth; diffusion barriers; organic and other materials and novel structures.
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