Tungsten and Other Refractory Metals for VLSI Applications: Proceedings of the 1985 Workshop Held October 7, 1985, Albuquerque, New Mexico, U.S.A. and (Unabridged)
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Seller's Description:
Good. Usual library markings, light wear. No DJ. Binding is tight. From the Table of Contents: Interconnects & VLSI-A Device Designer's Perspective-Chatterjee; Laser Direct Writing of Tungsten Lines for VLSI Applications-Liu; Interaction of Fluorine Compounds with Tungsten and Silicon-Winters; Plasma-Enhanced Deposition of Metal Films-Hess; Contact Resistance Results on CVD Blanket Tungsten Plugs-Smith, etc.