Paperback,
Very Good
Metrology, Inspection, and Process Control for Microlithography XIII: 15-18 March, 1999, Santa Clara, California (Proceedings of Spie--the International Society for Optical Engineering, V. 3677. )
by Society Of Photo-Optical Instrumentation Engineers, Semiconductor Equipment And Materials International
1999, Society of Photo Optical
ISBN-13:
9780819431516
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HPB-Emerald
HIGH
Dallas,
TX,
USA
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$83.01
$160.00
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