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Precision Control of Planar Motion Stages

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Precision Control of Planar Motion Stages - Gao, Wei, and Dian, Songyi
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Planar motion stages actuated by planar motors, which can generate XY in-plane motions, have the advantages of direct drive, high speed, non-contact levitation and simple structure. Such kinds of stages, however, are sensitive to interferences between axes, modeling uncertainties and disturbances because there are no mechanical restrictions in the XY plane. Conventional stage controllers based on classical control methods cannot achieve satisfied positioning performance for the stage. This book presents the design and ...

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Precision Control of Planar Motion Stages 2010, VDM Verlag, Saarbrucken

ISBN-13: 9783639220377

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