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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing

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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Gao, Wei
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This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.

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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing 2014, Springer, London

ISBN-13: 9781447157434

2010 edition

Trade paperback

Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing 2010, Springer, London

ISBN-13: 9781849962537

Hardcover