This textbook to provides a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. It takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
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This textbook to provides a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. It takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
Read Less