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VLSI Technology - Sze, Simon
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This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.

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VLSI Technology 1998, McGraw-Hill Professional

ISBN-13: 9780070627352

2nd edition

Hardcover

VLSI Technology 1983, McGraw-Hill Companies

ISBN-13: 9780070626867

Hardcover