Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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Add this copy of Microlithography: Science and Technology to cart. $23.83, very good condition, Sold by ThriftBooks-Atlanta rated 5.0 out of 5 stars, ships from Austell, GA, UNITED STATES, published 1998 by CRC Press.
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