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Fundamentals of Nanoscale Film Analysis

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Fundamentals of  Nanoscale Film Analysis - Alford, Terry L., and Feldman, L.C., and Mayer, James W.
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Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the structure and composition of the surface and the outer few tens to hundred nanometers in depth. It describes characterization techniques to quantify the structure, composition and depth distribution of materials with ...

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Fundamentals of  Nanoscale Film Analysis 2010, Springer-Verlag New York Inc., New York, NY

ISBN-13: 9781441939807

Paperback

Fundamentals of Nanoscale Film Analysis 2007, Springer, New York, NY

ISBN-13: 9780387292601

2007 edition

Hardcover