The first volume in this set offers a rigorous theoretical treatment of micro- and nanosciences and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. The text is illustrated in color ...
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The first volume in this set offers a rigorous theoretical treatment of micro- and nanosciences and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. The text is illustrated in color throughout and contains worked-out examples and end-of-chapter problems. Ancillaries are available with qualifying course adoption.
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