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From Mems to Bio-Mems and Bio-Nems: Manufacturing Techniques and Applications

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From Mems to Bio-Mems and Bio-Nems: Manufacturing Techniques and Applications - Madou, Marc J
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This book details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. This color text offers end-of-chapter problems, worked examples throughout, extensive ...

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From Mems to Bio-Mems and Bio-Nems: Manufacturing Techniques and Applications 2011, CRC Press, Oxford

ISBN-13: 9781420055160

Hardcover