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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
by Kaajakari, Ville
2009, Small Gear Publishing
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Practical Mems Design of Microsystems, Accelerometers, Gyroscopes, Rf Mems, Optical Mems, and Microfluidic Systems
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2009, Small Gear Publishing
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