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Wafer Fabrication: Automatic Material Handling System - Zhang, Jie, and Huazhong University of Science and Technology (Contributions by)
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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and o

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Wafer Fabrication: Automatic Material Handling System 2018, de Gruyter, Berlin/Boston

ISBN-13: 9783110486902

Hardcover