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Total-Reflection X-Ray Fluorescence Analysis

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Total-Reflection X-Ray Fluorescence Analysis - Klockenkamper, Reinhold
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Over the past decade, total-reflection X-ray fluorescence, or TXRF, has been used increasingly for multi element analysis in laboratories and industry worldwide. Providing reliable, economical readings of the minute mass or low concentration of elements, TXRF is especially suitable for micro- and trace analysis. It is also effective in the analysis of flat sample surfaces and stratified near-surface layers, offering a nondestructive means of quality control of wafers for the semiconductor industry. This is the first book ...

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Total-Reflection X-Ray Fluorescence Analysis 1996, Wiley-Interscience, New York, NY

ISBN-13: 9780471305248

Hardcover