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Silicon Molecular Beam Epitaxy: Volume II

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Silicon Molecular Beam Epitaxy: Volume II - Kasper, E.
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This book focuses on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. It discusses the obstacles any new technology must overcome to be commercially successful with specific references to the challenges confronting Silicon-Molecular Beam Epitaxy.

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Silicon Molecular Beam Epitaxy: Volume II 2017, CRC Press, London

ISBN-13: 9781315897523

Hardcover