Given the variety of different exhaust compounds and the various threats that each poses to the exhaust management system, the proper choice of exhaust system can become a confusing and daunting task. This invaluable reference offers practical guidance on selecting an appropriate system for a given application. The author begins with facility layout, support facilities operation, and semiconductor process equipment, followed by exhaust types and challenges. Next, several chapters explore the different types of devices such ...
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Given the variety of different exhaust compounds and the various threats that each poses to the exhaust management system, the proper choice of exhaust system can become a confusing and daunting task. This invaluable reference offers practical guidance on selecting an appropriate system for a given application. The author begins with facility layout, support facilities operation, and semiconductor process equipment, followed by exhaust types and challenges. Next, several chapters explore the different types of devices such as point-of-use devices, centralized wet scrubbers, and centralized VOC control. The book concludes with chapters devoted to emergency releases and examples of these systems in use.
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Add this copy of Semiconductor Industry: Wafer Fab Exhaust Management to cart. $266.55, new condition, Sold by Booksplease rated 3.0 out of 5 stars, ships from Southport, MERSEYSIDE, UNITED KINGDOM, published 2005 by CRC Press.
Add this copy of Semiconductor Industry: Wafer Fab Exhaust Management to cart. $356.98, new condition, Sold by GridFreed rated 5.0 out of 5 stars, ships from North Las Vegas, NV, UNITED STATES, published 2005 by CRC Press.
