The fruit of nearly ten years of active work and collaboration in both the academic and industrial settings, this book offers in-depth analyses of run-to-run (R2R) control. The authors develop methods with a totally new, commercially proven approach that provides a path to the robust, effective R2R control destined to replace the ad hoc, piecemeal, error-prone, or, in most cases, nonexistent sequential control methods of the past. Through manufacturing case studies, this book provides justification for and demonstrates the ...
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The fruit of nearly ten years of active work and collaboration in both the academic and industrial settings, this book offers in-depth analyses of run-to-run (R2R) control. The authors develop methods with a totally new, commercially proven approach that provides a path to the robust, effective R2R control destined to replace the ad hoc, piecemeal, error-prone, or, in most cases, nonexistent sequential control methods of the past. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
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Add this copy of Run-to-Run Control in Semiconductor Manufacturing to cart. $264.49, new condition, Sold by Media Smart rated 4.0 out of 5 stars, ships from Hawthorne, CA, UNITED STATES, published 2000 by Taylor & Francis Group.
