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Seller's Description:
Very Good with no dust jacket. 1566771838. Library stamps/marks/labels/pocket, otherwise light wear. Crisp hardcover.; "Held as a part of the Joint International Meeting of the Electrochemical Society, Inc. and the International Society for Electrochemistry in Paris, France, Aug. 31-Sept. 5, 1997"--P. iii. 192nd ECS Meeting. "Both fundamental and applied aspects will be emphasized, related to the following topics used in the fabrication of submicron semiconductor devices: plasma processes and reactors; photochemical (laser, UV) processes for etching, deposition, and surface cleaning; rapid thermal processing; and process diagnostics, control, and modeling related to thin film processes."; Proceedings / Electrochemical Society; Ex-Library; Vol. 97-30; 370 pages.
