This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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Publisher:
SPIE-International Society for Optical Engineering
Published:
2019
Language:
English
Alibris ID:
18074372000
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Standard Shipping: $4.72
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Seller's Description:
Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or limited writing/highlighting. We ship orders daily and Customer Service is our top priority!
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Seller's Description:
Very Good; Hardcover; Light wear to the covers; Unblemished textblock edges; The endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be shipped in a sturdy cardboard box with foam padding; Medium-Large Format (Quatro, 9.75"-10.75" tall); Green and black covers with title in white lettering; 3rd Edition; 2011, SPIE Press; 526 pages; "Principles of Lithography, " by Harry J. Levinson.
Publisher:
SPIE-International Society for Optical Engineering
Published:
2001
Language:
English
Alibris ID:
17558093277
Shipping Options:
Standard Shipping: $4.72
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Seller's Description:
Good; Hardcover; Covers are still glossy, but with a number of small dings and scratches; Small wrinkle to the right edge of about 20 pages, otherwise the endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be shipped in a sturdy cardboard box with foam padding; Medium-Large Format (Quatro, 9.75"-10.75" tall); 1.9 lbs; Light blue-green covers with title in white lettering; 2001, Society of Photo Optical; 410 pages; "Principles of Lithography (SPIE PRESS Monograph Vol. PM97), " by Harry J. Levinson.
Publisher:
SPIE-International Society for Optical Engineering
Published:
2001
Language:
English
Alibris ID:
18088467026
Shipping Options:
Standard Shipping: $4.72
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority!