This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Read Less