This book details how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. It features a case study approach that includes the design of uniaxial piezoresistors and pressure sensors.
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This book details how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. It features a case study approach that includes the design of uniaxial piezoresistors and pressure sensors.
Read Less