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Piezoelectric Mems Resonators - Bhugra, Harmeet (Editor), and Piazza, Gianluca (Editor)
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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical ...

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Piezoelectric Mems Resonators 2018, Springer, Cham

ISBN-13: 9783319804057

Trade paperback

Piezoelectric Mems Resonators 2017, Springer, Cham

ISBN-13: 9783319286860

2017 edition

Hardcover