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Perspectives, Science and Technologies for Novel Silicon on Insulator Devices

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Perspectives, Science and Technologies for Novel Silicon on Insulator Devices - Hemment, Peter L F (Editor), and Lysenko, Vladimir S (Editor), and Nazarov, Alexei N (Editor)
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Preface. Committee Members. Invited Speakers. Workshop Photographs. Section 1: Innovations in Materials Technologies. 1.1. SMART-CUT(R) Technology: Basic Mechanisms and Applications; M. Bruel. 1.2. Polish Stop Technology for Silicon on Silicide on Insulator Structures; H.S. Gamble. 1.3. Homoepitaxy on Porous Silicon with a Buries Oxide Layer; Full-Wafer Scale SOI; S.I. Romanov, et al. 1.4. Structural and Electrical Properties of Silicon on Isolator Structures Manufactured on FZ- and CZ-Silicon by SMART-CUT Technology; V.P. ...

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Perspectives, Science and Technologies for Novel Silicon on Insulator Devices 1999, Springer, Dordrecht

ISBN-13: 9780792361176

Trade paperback

Perspectives, Science and Technologies for Novel Silicon on Insulator Devices 1999, Kluwer Academic Publishers, Dordrecht, Netherlands

ISBN-13: 9780792361169

Hardcover