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Organometallic Vapor-Phase Epitaxy: Theory and Practice

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Organometallic Vapor-Phase Epitaxy: Theory and Practice - Stringfellow, Gerald B
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Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE ...

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Organometallic Vapor-Phase Epitaxy: Theory and Practice 1998, Academic Press, San Diego, CA

ISBN-13: 9780126738421

2nd edition

Hardcover

Organometallic Vapor-Phase Epitaxy: Theory and Practice 1989, Academic Press, Boston, MA

ISBN-13: 9780126738407

Hardcover