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Optical Inspection of Microsystems, Second Edition - Osten, Wolfgang (Editor)
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This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.

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Optical Inspection of Microsystems, Second Edition 2019, CRC Press, Oxford

ISBN-13: 9781498779470

2nd edition

Hardcover