Optical Inspection of Microsystems, Second Edition

This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS. Read More

This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS. Read Less

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  	This is a digital edition of this title. Rent eBook (2 Options) 180 Day Rental: $154.00 (Expires Jul 03, 2025) 365 Day Rental: $182.00 (Expires Jan 04, 2026) Buy eBook Lifetime Access: $280.00 Title: Optical Inspection of Microsystems by Wolfgang Osten Publisher: Taylor & Francis Print ISBN: 9781498779470, 1498779476 eText ISBN: 9780429532658 Edition: 2019 2nd edition Format: EPUB eBook	$154.00 Rent eBook This is a digital eBook Nothing will be shipped to you Works with web browsers and the VitalSource app on all Windows, Mac, Chromebook, Kindle Fire, iOS, and Android devices Most eBooks are returnable within 14 days of purchase Questions? See our eBook FAQ