Nano- and Micro-Electromechanical Systems builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book includes homework problems, examples, and a further reading section ...
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Nano- and Micro-Electromechanical Systems builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book includes homework problems, examples, and a further reading section in every chapter and offers a solutions manual for qualifying instructors.
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Seller's Description:
New. Sewn binding. Cloth over boards. 752 p. Contains: Illustrations, black & white, Illustrations, color, Halftones, black & white, Tables, black & white. Nano- And Microscience, Engineering, Technology, and Medicin, 8.
