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MOS (Metal Oxide Semiconductor) Physics and Technology - Nicollian, E. H., and Brews, J. R.
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Explains the theoretical and experimental foundations of the measurement of the electrical properties of the MOS system and the technology for controlling its properties. Emphasizes the silica and the silica-silicon interface. Provides a critical assessment of the literature, corrects incomplete or incorrect theoretical formulations, and gives critical comparisons of measurement methods. Contains information needed to grow an oxide, make an MOS capacitor array, and fabricate an integrated circuit with optimal performance ...

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MOS (Metal Oxide Semiconductor) Physics and Technology 2002, Wiley-Interscience

ISBN-13: 9780471430797

Paperback

Mos (Metal Oxide Semiconductor) Physics and Technology 1982, Wiley-Interscience, New York, NY

ISBN-13: 9780471085003

Hardcover