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Metrology and Diagnostic Techniques for Nanoelectronics - Ma, Zhiyong (Editor), and Seiler, David G. (Editor)
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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches ...

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Metrology and Diagnostic Techniques for Nanoelectronics 2016, Pan Stanford Publishing Pte Ltd, Singapore

ISBN-13: 9789814745086

Hardcover