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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions - Rossnagel, Stephen M, and Westwood, William D, and Cuomo, Jerome J
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions 1990, William Andrew

ISBN-13: 9780815512202

Hardcover