Covering all aspects of PVD process technology, from the characterization and preparation of the substrate material to post deposition processing. This volume emphasizes the aspects of process flow critical to economical deposition of films that can meet the required performance specifications.
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Covering all aspects of PVD process technology, from the characterization and preparation of the substrate material to post deposition processing. This volume emphasizes the aspects of process flow critical to economical deposition of films that can meet the required performance specifications.
Read Less
