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Handbook of Photomask Manufacturing Technology

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Handbook of Photomask Manufacturing Technology - Rizvi, Syed (Editor)
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As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it is increasingly important for new technologies to keep pace with these demands. Photomask technology is one of the key areas to achieving this goal. This valuable reference provides a comprehensive summary of all areas of mask technology in a single work, featuring contributions from 40 internationally reputable authors from industry, academia, government, national labs, and consortia. They discuss ...

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Handbook of Photomask Manufacturing Technology 2005, CRC Press, Oxford

ISBN-13: 9780824753740

Hardcover