For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time ...
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For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
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Seller's Description:
New in new dust jacket. Glued binding. Paper over boards. Contains: Tables, black & white, Figures. Audience: General/trade. Brand new book-international edition--
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
Good. Gently used with minimal wear on the corners and cover. A few pages may contain light highlighting or writing but the text remains fully legible. Dust jacket may be missing and supplemental materials like CDs or codes may not be included. Could have library markings. Ships promptly!
