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Foundations of Mems - Liu, Chang
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For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time ...

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Foundations of Mems 2011, Pearson, Upper Saddle River

ISBN-13: 9780132497367

2nd edition

Hardcover

Foundations of MEMS 2005, Prentice Hall, Upper Saddle River, NJ

ISBN-13: 9780131472860

Trade paperback