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Flash Lamp Annealing: From Basics to Applications

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Flash Lamp Annealing: From Basics to Applications - Rebohle, Lars, and Prucnal, Slawomir, and Reichel, Denise
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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated ...

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Flash Lamp Annealing: From Basics to Applications 2020, Springer Nature Switzerland AG, Cham

ISBN-13: 9783030233013

Paperback

Flash Lamp Annealing: From Basics to Applications 2019, Springer, Cham

ISBN-13: 9783030232986

2019 edition

Hardcover