The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization ...
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The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.
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Seller's Description:
Good. American Institute of Physics, 1998. Includes unopened CD ROM in original packaging; Cover very lightly rubbed, lightly bumped; top and fore edges very barely soiled/bumped, bottom edge very lightly soiled; binding tight; cover and interior intact and very clean; a nice copy; due to the size/weight of this item additional shipping charges may apply. hardcover. Good.
