Advances in Research and Development: Modeling of Film Deposition for Microelectronic Applications: Modeling of Film Deposition for Microelectronic Applications
Advances in Research and Development: Modeling of Film Deposition for Microelectronic Applications: Modeling of Film Deposition for Microelectronic Applications
This serial contains studies of the properties of various thin films materials and systems. This volume presents five different models of computer simulation techniques to thin film deposition as applied to modern microelectronics. The book focuses on the simulation and experimental confirmation of how surfaces evolve on a microscopic scale during thin film processing in relation to semiconductor dimensions. There are two general classes of model: the molecular dynamics model and the shock-tracking model, and several ...
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This serial contains studies of the properties of various thin films materials and systems. This volume presents five different models of computer simulation techniques to thin film deposition as applied to modern microelectronics. The book focuses on the simulation and experimental confirmation of how surfaces evolve on a microscopic scale during thin film processing in relation to semiconductor dimensions. There are two general classes of model: the molecular dynamics model and the shock-tracking model, and several chapters cover each approach. The chapters contain general physics relevant to the model, the general mathematical construction of the model (criteria consevation laws, etc), and a comparison of modelling and results relevant to the particular model. Each chapter covers the individual's lab approach rather than the entire field and is heavily referenced.
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Seller's Description:
Volume 22. This is an ex-library book and may have the usual library/used-book markings inside. This book has hardback covers. Clean from markings In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item, 700grams, ISBN: 9780125330220.
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Seller's Description:
*Price HAS BEEN REDUCED by 10% until Monday, Dec. 2 (SALE ITEM)* 290 pp., Hardcover, ex library, else text clean and binding tight. -If you are reading this, this item is actually (physically) in our stock and ready for shipment once ordered. We are not bookjackers. Buyer is responsible for any additional duties, taxes, or fees required by recipient's country.
